Multi-chamber treatment system

Details Multi-chamber treatment system Multi-chamber treatment system

1997-04-28

1999-08-10

Keenan, James W.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

4147445, 4147446, 414939, B65G 4907

Patent

active

059348569

ABSTRACT:
Vacuum process chambers are increased or decreased in number when the kind or order of processes is changed, and the shape and size of the transfer chamber are changed with the increase or decrease of the number of the vacuum process chambers, without entailing any change in a load-lock chamber and a transfer arm. The transfer arm has a minimum radius of rotation such that the arm can rotate in a transfer chamber of a minimum size corresponding to a minimum number of vacuum process chambers and a maximum arm reach such that the arm can deliver an object to-be-treated between each vacuum process chamber and a transfer chamber of a maximum size corresponding to a maximum number of vacuum process chambers. Thus, even though the number of the vacuum process chambers are increased or decreased with the change of the processes, it is necessary only that the shape and size of the transfer chamber be changed, and the other components, such as the load-lock chamber, transfer arm, etc., can be used in common, so that the manufacture and assembling of the system are very easy, ensuring a reduction in cost. Also, reduced-pressure treatment apparatus and a normal-pressure treatment apparatus are connected to each other by means of the load-lock chamber for replacement between the atmosphere and vacuum.

REFERENCES:
patent: 4483654 (1984-11-01), Koch et al.
patent: 4797061 (1989-01-01), Munakata
patent: 5049029 (1991-09-01), Mitsui et al.
patent: 5151008 (1992-09-01), Ishida et al.
patent: 5611655 (1997-03-01), Fukasawa et al.
patent: 5636963 (1997-06-01), Haraguchi et al.

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