Spin coating apparatus

Details Spin coating apparatus Spin coating apparatus

1995-12-22

1999-02-02

Simmons, David A.

Coating apparatus

Projection or spray type

Rotating turret work support

118712, 118 52, B05A 1302, B05C 1102

Patent

active

058658939

ABSTRACT:
Uneconomical use of resist liquid is prevented by reducing resist liquid discharging time. Discharging time calculating means calculates a proper resist liquid discharging time, based on a first and a second rotation angular speeds of a supporting pedestal and a discharged flow quantity discharged from resist liquid discharging nozzle per unit time. When the proper resist liquid discharging time has elapsed from the start of discharging of the resist liquid by means of a pump, discharging of the resist liquid is stopped.

REFERENCES:
patent: 4451507 (1984-05-01), Beltz et al.
patent: 5439519 (1995-08-01), Sago et al.

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