Multiple array full width electro mechanical modulator

Details Multiple array full width electro mechanical modulator Multiple array full width electro mechanical modulator

1982-07-02

1985-01-08

Corbin, John K.

350487, 350269, G02F 129

Patent

active

044924356

ABSTRACT:
A full width opto-mechanical modulator comprised of a silicon chip have dual rows or arrays of flexible finger-like reflectors disposed thereon in staggered facing relationship to one another. The reflectors, the surface of which is highly reflective, bend in response to the application of a predetermined potential. The modulator is placed in the path of a beam of high intensity light, and potentials applied to selected reflectors in accordance with an image signal input cause the modulator to reflect light striking the individual reflectors in either an exposure path or against a beam stop.

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patent: 4281904 (1981-08-01), Sprague et al.
IBM (TDB), K. E. Peterson, "Micromechanical Light Deflector Array", vol. 20, No. 1, Jun. 1977.
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