Method of making a VCSEL with lateral index guide

Details Method of making a VCSEL with lateral index guide Method of making a VCSEL with lateral index guide

1994-03-28

1995-02-07

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

148DIG95, H01L 2120

Patent

active

053875435

ABSTRACT:
A VCSEL including a first mirror stack, an active region and a second mirror stack positioned on a substrate having a surface lying in a first plane and a centrally located offset area of the surface lying in a second plane parallel to the first plane and spaced therefrom. Portions of the active region and the first and second mirror stacks being offset from surrounding portions by the offset area in the surface of the substrate so as to define a lateral waveguide which confines the operating region of the VCSEL.

REFERENCES:
patent: 5115442 (1992-05-01), Lee et al.
patent: 5206872 (1993-04-01), Jewell et al.
patent: 5245622 (1993-09-01), Jewell et al.
patent: 5256596 (1993-10-01), Ackley et al.
patent: 5258316 (1993-11-01), Ackley et al.
patent: 5317587 (1994-05-01), Ackley et al.

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