Solid state micro-machined mass spectrograph universal gas detec

Details Solid state micro-machined mass spectrograph universal gas detec Solid state micro-machined mass spectrograph universal gas detec

1993-09-22

1995-01-31

Anderson, Bruce C.

Radiant energy

Ionic separation or analysis

250427, D01D 5944, H01J 4900

Patent

active

053861159

ABSTRACT:
A solid state mass spectrograph includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed on apertured partitions in the cavity forming compartments through which the cavity is evacuated by differential pumping. The mass filter is preferably a Wien filter with the magnetic field provided by a permanent magnet outside the substrate or by magnetic film on the cavity walls. The electric field of the Wien filter is provided by electrodes formed on walls of the cavity. The detector array is a linear array oriented in the dispersion plane of the mass filter and includes converging electrodes at the end of the cavity serving as Faraday cages which pass charge to signal generators such as charge coupled devices formed in the substrate but removed from the cavity.

REFERENCES:
patent: 3555273 (1971-01-01), Arnold
patent: 3925662 (1975-12-01), Dawson
patent: 4850371 (1989-07-01), Broadhurst et al.
patent: 4866267 (1989-09-01), Matsuda et al.
patent: 4885500 (1989-12-01), Hansen et al.
patent: 4947041 (1990-08-01), Tava
patent: 4948962 (1990-08-01), Mitsui et al.
patent: 4966141 (1990-10-01), Bacaner et al.
patent: 4994676 (1991-02-01), Mount
patent: 4996422 (1991-02-01), Mitsui et al.
patent: 4996424 (1991-02-01), Mimura et al.
patent: 5015845 (1991-05-01), Allen et al.
patent: 5015848 (1991-05-01), Bomse et al.
patent: 5026987 (1991-06-01), Bier et al.
patent: 5036195 (1991-07-01), Batev et al.
patent: 5043576 (1991-08-01), Broadhurst et al.
patent: 5072115 (1991-12-01), Zhou
patent: 5091645 (1992-02-01), Elliott
Microminiaturization of Electron Optical Systems, T. H. P. Chang, et al. J. Vacuum Sci. & Tech. (B), vol. 8, No. 6; Nov. Dec. 1990; pp. 1698-1705.
High-Energy Product Sm-Co-Based Sputtered Films, Crystal Texturing, and Magnetic Properties; F. J. Cadieu, et al.; J. Appl. Phys. 67(a), 1 May 1990 pp. 4969-4971.

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