Process of fabricating solid-state image pick-up device free fro

Details Process of fabricating solid-state image pick-up device free fro Process of fabricating solid-state image pick-up device free fro

1994-05-16

1995-01-31

Quach, T. N.

Fishing, trapping, and vermin destroying

437 53, 437984, 156653, H01L 3118

Patent

active

053858492

ABSTRACT:
A process of fabricating a solid-state image pick-up device forms a composite mask structure consisting of an upper photo-resist mask and a lower polysilicon layer patterned through the upper photo-resist mask and having an outer periphery offset to the outer periphery of the upper photo-resist mask, and formation of an n-type photo-electric converting region and a channel doping are sequentially carried out by using the upper photo-resist mask and the lower polysilicon layer in a self-aligned manner.

REFERENCES:
patent: 4910568 (1990-03-01), Takei et al.
patent: 5041392 (1991-08-01), Kuroda et al.
patent: 5288656 (1994-02-01), Kusaka et al.

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