Semiconductor strain gauge

Details Semiconductor strain gauge Semiconductor strain gauge

1982-04-01

1983-12-20

Albritton, C. L.

Electrical resistors

Strain gauge type

357 2, 357 26, G01L 122

Patent

active

044220634

ABSTRACT:
A semiconductor strain gauge comprises an elastic member having a surface subject to stress; a semiconductor substrate secured to the elastic member and including at least one PN junction wherein both the P type and N type material is composed of amorphous semiconducting material; and an electrical connection for conducting a signal indicative of strain.

REFERENCES:
patent: 3392576 (1968-07-01), Hollander, Jr.
patent: 3451030 (1969-06-01), Ganfinkel

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