Metal fusion bonding – Means to apply vibratory solid-state bonding energy to work
Patent
1993-12-22
1995-01-31
Simmons, David A.
Metal fusion bonding
Means to apply vibratory solid-state bonding energy to work
2281101, 1565801, B23K 106
Patent
active
053852885
ABSTRACT:
A bonding apparatus used in manufacturing semiconductor devices, etc. including an ultrasonic horn mounted to a bonding arm of the bonding apparatus via a horn support. The ultrasonic horn is provided with a bonding tool at one end and a vibration-generating source at another end, and respective values of vibrational wavelengths on both sides of the horn support are set so that the value on the bonding tool side of the horn support is 7 or greater relative to a value of 3 on the opposite side of the horn support from the capillary. In other words, the distance from the horn support to the end of the vibration-generating source is set to be 1/4 of the wavelength, and the distance from the horn support to the end of the horn where the bonding tool is attached is set to be 3/4 of the wavelength.
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Akiike Tadashi
Kawagishi Minoru
Kyomasu Ryuichi
Sakakura Mitsuaki
Kabushiki Kaisha Shinkawa
Sells J.
Simmons David A.
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