Semiconductor sensor

Details Semiconductor sensor Semiconductor sensor

1989-10-02

1992-01-21

Raevis, Robert R.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 1508

Patent

active

050818678

ABSTRACT:
A semiconductor sensor comprising a semiconductor sensor member provided on a support member. The sensor member has a base portion and a rim portion connected to each other by a beam portion. The base portion is fixed to the support member and the rim portion is held by the beam portion such that the rim portion is spaced apart from the base portion and the support portion. The beam portion is provided with a resistor to detect the changes of resistance values of the resistor due to mechanical stress caused at the beam portion.

REFERENCES:
patent: 3601209 (1971-08-01), Paelian
patent: 3712123 (1973-01-01), Laimins
patent: 3985025 (1976-10-01), Ormond
patent: 4017819 (1977-04-01), Pien
patent: 4812199 (1989-03-01), Sickafus
patent: 4849730 (1989-07-01), Izumi et al.
Roylance et al., "A Batch-Fabricated Silicon Accelerometer" IEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec. 1979.

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