Magnetic/electric field measuring device by means of an electron

Electricity: measuring and testing – Magnetic – Magnetometers

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324 72, 324501, G01R 3302, G01R 2914

Patent

active

048034304

ABSTRACT:
A magnetic/electric field measuring device is disclosed, which is provided with an electron beam generator for generating an electron beam finely focused; a sample table, on which a sample is placed; electron beam deflectors for sweeping the electron beam two-dimensionally along an end surface of the sample; two-dimensional semiconductor position detection element using a photodiode for detecting the incident position of the electron beam, which has passed along the end surface of the sample; and a display section for displaying the position signal coming from said two-dimensional semiconductor position detection element in synchronism with a scan signal for the electron beam.

REFERENCES:
Hutchison et al., IBM Tech. Disclosure Bulletin, vol. 11, No. 10 Mar. 1969.
Appl. Phys. Lett., vol. 42, No. 1, Jan. 1, 1983, Wells and Brunner, pp. 114-116.
IEEE Transactions on Magnetics, vol. Mac.-20, No. 5, Sep. 1984, Elsbrock and Balk, pp. 866-868.

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