Electronic device with a protective film

Details Electronic device with a protective film Electronic device with a protective film

1985-11-07

1987-04-07

O'Keefe, Veronica

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

428627, 428632, 357 71, H01L 2348, H01L 2900

Patent

active

046561013

ABSTRACT:
A electronic device having a structure in which at least one electronic element, including an insulating film or covered with a protecting film, is formed on a substrate, where the insulating or protecting film consist principally of aluminum nitride. Alternatively, the insulating or protecting film can be a laminated member composed of a film consisting principally of aluminum nitride and a film consisting principally of silicon oxide or silicon nitride.

REFERENCES:
patent: 4523966 (1985-06-01), Tsuya et al.
patent: 4525223 (1985-06-01), Tsuya et al.
patent: 4527184 (1985-07-01), Fischer
patent: 4576851 (1986-03-01), Iwamatsu

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