Process for preparing a functional deposited film

Details Process for preparing a functional deposited film Process for preparing a functional deposited film

1986-03-24

1989-02-07

Childs, Sadie

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

136258, 427 42, 427 451, 427255, 4272551, 4272552, 437 5, 437173, B05D 306

Patent

active

048030937

ABSTRACT:
Process for preparing a functional film deposited on a substrate having practically applicable characteristics which is usable as a photoconductive member in semiconductor device, image input line sensor, image pickup device on the like by generating an active species by subjecting a gaseous substance capable of being activated to generate said active species to the action of activating energy in an active species generating and transporting space leading to a film forming space containing the substrate;

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