Method of making zero temperature coefficient of resistance resi

Details Method of making zero temperature coefficient of resistance resi Method of making zero temperature coefficient of resistance resi

1983-06-17

1986-04-01

Ozaki, George T.

Metal treatment

Compositions

Heat treating

29576B, 29577C, H01L 21425

Patent

active

045796009

ABSTRACT:
Polysilicon resistors and integrated circuits are brought to zero or positive temperature coefficient (TCR) by a combination of laser annealing and ionic hydrogen plasma treatment.

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patent: 4318752 (1982-03-01), Tien
patent: 4319954 (1982-03-01), White et al.
patent: 4364779 (1982-12-01), Kamgur et al.
patent: 4464839 (1984-08-01), Dath et al.
patent: 4467519 (1984-08-01), Glang et al.

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