Substrate positioning apparatus

Details Substrate positioning apparatus Substrate positioning apparatus

1985-05-03

1987-04-07

Griffin, Donald A.

Photocopying

Projection printing and copying cameras

Step and repeat

414225, G03B 2742, A23G 900

Patent

active

046555846

ABSTRACT:
An apparatus for positioning a planar substrate on a plane relative to a stage comprises means for supporting the substrate on the plane, the supporting means being provided on the stage for rotation about an axis perpendicular to the plane, first drive means for moving the substrate relative to the supporting means in a predetermined direction along the plane, a reference member disposed on the stage and having a reference surface intersecting the plane, the reference member having a position in which the reference surface is opposed to the substrate moved in the predetermined position so that the reference surface is brought into contact with the circumferential end of the substrate moved by the first drive means to thereby position the substrate, and a biased position in which the reference surface is biased away from the circumferential end of the substrate from the opposed position, and second drive means for displacing the reference member between the opposed position and the biased position.

REFERENCES:
patent: 3722996 (1973-03-01), Fox
patent: 3930684 (1976-01-01), Lasch et al.
patent: 4345836 (1982-08-01), Phillips
patent: 4385083 (1983-05-01), Shelley
patent: 4407627 (1983-10-01), Sato et al.
patent: 4483434 (1984-11-01), Miwa et al.
patent: 4556362 (1985-12-01), Bahnck et al.
IBM Technical Disclosure Bulletin, vol. 14, No. Sep. 1972, "Wafer Centering Fixture".

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