Optical profilometer for steep surface contours with significant

Details Optical profilometer for steep surface contours with significant Optical profilometer for steep surface contours with significant

1985-10-04

1986-04-01

Rosenberger, R. A.

Optics: measuring and testing

By polarized light examination

With light attenuation

250201, G01B 1124

Patent

active

045794545

ABSTRACT:
An optical profilometer for surface contours subject to tilt is optically scanned to measure the surface contours. Surface tilt effects are obviated by slitted apertures in the paths of the reflection beams to pass the beams with large surface tilts (on the order of 30.degree.) without loss of sensitivity, accuracy, or precision.

REFERENCES:
patent: 3719421 (1973-03-01), Poilleux et al.
patent: 3925603 (1975-12-01), Naruse et al.
The Microscope, vol. 21, 1st Qt., Jan. 1973, pp. 59-64, entitled "Quantitative Determination of Surface Topography by Light Microscopy," by H. E. Keller.
RCA Engineer, 26-2, Sep./Oct. 1980, pp. 75-80, entitled "Electro-optical Techniques for Measurement and Inspection," by D. P. Bortfeld et al.
Applied Optics, vol. 21, No. 17, 9/1/82, pp. 3200-3208, entitled, "Optical Profilometer", by Y. Fainman et al.

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