Optical probe

Details Optical probe Optical probe

1994-03-14

1995-10-03

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

33561, G01B 902

Patent

active

054556775

ABSTRACT:
An optical probe for measurement includes a first movable part having a stylus arranged at one end of the first movable part in a Z-direction and a sliding part movable in the Z-direction in an air bearing mechanism. A measuring device measures the Z coordinate of the first movable part.

REFERENCES:
patent: 4153370 (1979-05-01), Corey
patent: 4611403 (1986-09-01), Morita et al.
patent: 4611916 (1986-09-01), Yoshizumi
patent: 4776699 (1988-10-01), Yoshizumi
patent: 5144150 (1992-09-01), Yoshizumi et al.
patent: 5313260 (1994-05-01), Magyar et al.

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