Method for repairing silver image glass photomasks with Ni

Details Method for repairing silver image glass photomasks with Ni Method for repairing silver image glass photomasks with Ni

1982-11-03

1983-12-20

Schilling, Richard L.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

2505151, 350314, 350319, 428 38, 430 16, G03F 500, G02B 522

Patent

active

044218362

ABSTRACT:
A method for repairing defects in the form of discontinuities in a photomask pattern in or on a glass substrate by means of electroless deposition of a nickel-containing coating on the surface of a glass substrate is disclosed.

REFERENCES:
patent: 2732298 (1956-01-01), Stookey
patent: 2911749 (1959-11-01), Stookey
patent: 2927042 (1960-03-01), Hall et al.
patent: 3561963 (1971-02-01), Kiba
patent: 3573948 (1971-04-01), Tarnopol
patent: 3620795 (1971-11-01), Kiba
patent: 3669770 (1972-06-01), Feldstein
patent: 3672939 (1972-06-01), Miller
patent: 3723158 (1973-03-01), Miller
patent: 3732792 (1973-05-01), Tarnopol et al.
patent: 4155735 (1979-05-01), Ernsberger
patent: 4309495 (1982-01-01), Ernsberger

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