Method of adjusting the pressure detection value of semiconducto

Details Method of adjusting the pressure detection value of semiconducto Method of adjusting the pressure detection value of semiconducto

1993-02-11

1995-10-03

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437901, 148DIG93, H01L 21465

Patent

active

054552036

ABSTRACT:
A method of adjusting a semiconductor pressure switch of the type having a silicon substrate having a pressure receiving diaphragm includes mounting and pressurizing the semiconductor pressure switch in a pressure chamber and measuring the pressure of the switch to determine if the pressure is above or below the predetermined pressure detection value. If the measured pressure is above the predetermined pressure detection value, the thickness of the diaphragm is adjusted by thinning the diaphragm to adjust the measured pressure to the predetermined pressure detection value. If the measured pressure is below the predetermined pressure detection value, the thickness of the diaphragm is adjusted by thickenning the diaphragm to adjust the measured pressure to the predetermined pressure detection value.

REFERENCES:
patent: 4622856 (1986-11-01), Binder et al.

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