System and method for determining near--surface lifetimes and th

Details System and method for determining near--surface lifetimes and th System and method for determining near--surface lifetimes and th

1997-07-03

2000-01-04

Ballato, Josie

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324455, G01R 3126, G01N 2760

Patent

active

060114045

ABSTRACT:
The present invention is directed to a system for, and method of, determining a non-contact, near-surface generation and recombination lifetimes and near surface doping of a semiconductor material. The system includes: (1) a radiation pulse source that biases a dielectric on top of the semiconductor material, (2) a voltage sensor to sense the surface voltage, and (3) a photon source to create carriers. For lifetime measurements both the excitation and measurement signals are time dependent and may be probed near the surface of the semiconductor to obtain various electrical properties. For high-field tunneling and leakage characteristics of a thin dielectric (<15 nm) on top of the semiconductor, a high bias charge density is used to induce tunneling, from which tunneling fields and charge-fluence to tunneling of the dielectric are determined.

REFERENCES:
patent: 4812756 (1989-03-01), Curtis et al.
patent: 5216362 (1993-06-01), Verkuil
patent: 5485091 (1996-01-01), Verkuil
patent: 5498974 (1996-03-01), Verkuil et al.
patent: 5661408 (1997-08-01), Kamieniecki et al.
patent: 5773989 (1998-06-01), Edelman et al.
patent: 5834941 (1998-11-01), Verkuil
Bickley, "Quantox (TM)--Non-contact Oxide Monitoring System", Keithley Instruments, Inc., 1995 No Month.

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