Method of making photoelectric conversion device

Details Method of making photoelectric conversion device Method of making photoelectric conversion device

1985-04-11

1986-07-01

Weisstuch, Aaron

Metal working

Method of mechanical manufacture

Assembling or joining

136244, 136258, 156643, 219121LH, 29583, 29591, H01L 2714, H01L 3118

Patent

active

045971617

ABSTRACT:
A photoelectric conversion device in which a plurality n (n being an integer larger than one) of semiconductor elements U.sub.1 to U.sub.n are sequentially formed on a substrate in a side-by-side relation and connected in series one after another. The substrate is formed by an insulating sheet-like member having an insulating film formed on a flexible metallic sheet-like member. The element U.sub.i (i=1, 2, . . . n) has a first electrode E.sub.i, a non-single-crystal semiconductor laminate member Q.sub.i formed on the first electrode E.sub.i and having formed therein at least one PN or PIN junction, and a second electrode F.sub.i formed on the semiconductor laminate member Q.sub.i. The element U.sub.i is formed by the following process: (a) a first conductive layer which will ultimately serve as the first electrode E.sub.i is formed on the substrate and then subjected to a first laser beam scanning, (b) a non-single-crystal semiconductor laminate member which will ultimately serve as the semiconductor laminate member Q.sub.i is formed to cover the first electrode E.sub.i and then subjected to a second laser beam scanning, (c) a second conductive layer which will ultimately serve as a second electrode F.sub.i is formed on the semiconductor laminate member Q.sub.i and then subjected to a third laser beam scanning.

REFERENCES:
patent: 4292092 (1981-09-01), Hanak
patent: 4315096 (1982-02-01), Tyan et al.
patent: 4334120 (1982-06-01), Yamano et al.

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