Optical: systems and elements – Holographic system or element – Using a hologram as an optical element
Patent
1991-02-21
1992-09-22
Miller, Stanley D.
Optical: systems and elements
Holographic system or element
Using a hologram as an optical element
359 87, G02F 11343
Patent
active
051502330
ABSTRACT:
A liquid crystal device if formed by disposing a liquid crystal between a pair of oppositely disposed electrodes, at least one of which has a laminated structure including a first layer of ITO (indium tin oxide), a second layer of Mo (molybdenum) or its alloy, and a third layer of Al (aluminum) or its alloy, disposed in the order named. Because of the Mo-based second layer, the ITO layer is protected during development of a photoresist layer formed on the Al-based third layer even if some pinholes are present in the Al-based third layer. The Mo-based second layer can be etched by an etchant for the Al-based third layer so that the entire process is not complicated because of the provision of the Mo-based second layer.
REFERENCES:
patent: 4853296 (1989-08-01), Fukuyoshi
patent: 4859036 (1989-08-01), Yamanaka et al.
patent: 4937423 (1990-06-01), Yoshihara et al.
patent: 5000545 (1991-03-01), Yoshioka et al.
patent: 5007716 (1991-04-01), Hanyu et al.
Enomoto Takashi
Nishida Naoya
Yoshioka Toshifumi
Canon Kabushiki Kaisha
Gross Anita Pellman
Miller Stanley D.
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