Process for producing semiconductor substrate by heat treating

Details Process for producing semiconductor substrate by heat treating Process for producing semiconductor substrate by heat treating

1998-07-20

2000-09-19

Chaudhari, Chandra

Semiconductor device manufacturing: process

Bonding of plural semiconductor substrates

Thinning of semiconductor substrate

438409, H01L 2130

Patent

active

061211176

ABSTRACT:
A process for producing a semiconductor substrate comprises heat-treating a substrate having a monocrystal thereon in a reducing atmosphere.

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