Dual-mode Z-stage

Details Dual-mode Z-stage Dual-mode Z-stage

1990-10-22

1992-09-22

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

269 60, G01R 3102, B23Q 318

Patent

active

051500400

ABSTRACT:
A dual mode Z/Theta stage supports and moves a work piece such as a semiconductor wafer into position for positioning during testing. The Z/Theta stage has a peripheral four point elevator drive. The elevating suspension comprises parallel, vertically oriented, rigid lift pins which bear the weight of a top-plate. The lift pins are located about the periphery of the stage to provide stability of the support. The top plate essentially floats on the lift pins so that virtually no frictional forces are translated to lift pins. The lift pins are elevated together by the force of four matched pin lift levers, crank arms. The crank arms are driven by downward force from a vertically translating air piston which is in contact with the crank arms 31. The air piston provides a gentle force moderated by pneumatic pressure which can moderate the full force of a stepping motor which drives it.

REFERENCES:
patent: 4534695 (1985-08-01), Stump et al.
patent: 4560880 (1985-12-01), Petric et al.
patent: 4770531 (1988-09-01), Tanaka et al.
patent: 4856641 (1989-08-01), Matsumura et al.
Odhams Practical and Technical Encyclopedia; Odhams Press Limited, London, England; pp. 328, 329; Publisher Prior to 1959; copy in Group 260.

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