Optical: systems and elements – Lens – With reflecting element
Patent
1997-12-01
2000-05-09
Sugarman, Scott J.
Optical: systems and elements
Lens
With reflecting element
359631, 359730, 359731, G02B 1700, G02B 2714
Patent
active
06061188&
ABSTRACT:
In a projection printing apparatus, illumination light from a lamp housing illuminates a photomask, and a diffracted light beam from the photomask is focused on an exposed substrate via a projection optical system to project a circuit pattern, the projection optical system including first and second halfmirrors and first and second concave mirrors. The first and second halfmirrors are arranged in symmetry or similar symmetry with respect to a normal to an optical axis of a diffracted light beam directed from the first halfmirror to the second halfmirror. Thus, a projection printing apparatus and a projection printing method are obtained in which unevenness in transmissivity in the projection optical system can be compensated for and steric hindrance or degradation of image characteristics is not caused.
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Mitsubishi Denki & Kabushiki Kaisha
Sugarman Scott J.
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