Foreign particle inspection apparatus

Details Foreign particle inspection apparatus Foreign particle inspection apparatus

1992-01-21

1992-09-22

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356239, G01N 2186

Patent

active

051499827

ABSTRACT:
In a foreign particle inspection apparatus for detecting foreign particles present on a transparent object, a light beam is applied obliquely to one surface of the object, and the object and the light beam are moved relatively to scan an area of the surface. A photoelectric converter has a light receiving surface disposed to oppose the surface of the object and at least one end of the object. The converter receives scattered light from the foreign particles incident on the light receiving surface and outputs an electrical signal. A light intercepting member is disposed to intercept light propagated in the object from the scanning area toward the end of the object, that would otherwise be transmitted through the end of the object and travel externally of the object to the light receiving surface.

REFERENCES:
patent: 4249075 (1981-02-01), Lovalenti
patent: 4468120 (1984-08-01), Tanimoto et al.
patent: 4568835 (1986-02-01), Imamura et al.
patent: 4790662 (1988-12-01), Bischkopf et al.
patent: 4966457 (1990-10-01), Hayano et al.
patent: 5032732 (1991-07-01), Orazio, Jr. et al.

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