Polishing apparatus with improved exhaust

Details Polishing apparatus with improved exhaust Polishing apparatus with improved exhaust

Filed on

1994-12-13

Date issued

1997-08-05

Examiner

Eley, Timothy V.

Patent Class

Abrading

SubClass

Machine

SubSubClass

Combined

Other Related Categories

451288, 451290, 451331, 451456, B24B 704, B24B 2902

Type

Patent

Status

active

Patent number

056536232

Description

ABSTRACT:
A polishing apparatus for polishing a surface of a workpiece such as a semiconductor wafer is installed in a clean room. The polishing apparatus includes a polishing section having a turntable with an abrasive cloth mounted on an upper surface thereof, a top ring for supporting the workpiece to be polished and pressing the workpiece against the abrasive cloth, a loading section for loading the workpiece to be polished onto the top ring, and an unloading section for unloading the workpiece which has been polished from the top ring. A cover covers an entire area of movement of the top ring including the polishing section, the loading section and the unloading section. An exhaust duct discharges air of an interior space of the cover to an outside of an installation space of the polishing apparatus.

REFERENCES:
patent: 3905273 (1975-09-01), Shook
patent: 4514936 (1985-05-01), Hurtado
patent: 4680893 (1987-07-01), Cronkhite et al.
patent: 4974370 (1990-12-01), Gosis
patent: 5010692 (1991-04-01), Ishida et al.
patent: 5131192 (1992-07-01), Cheng et al.

Affiliated with

Also associated with

Rating

Polishing apparatus with improved exhaust does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Polishing apparatus with improved exhaust, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polishing apparatus with improved exhaust will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1070790