Method and apparatus for analyzing fluorine containing gases

Chemistry: analytical and immunological testing – Condition responsive control

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422 88, 422 93, 422111, 372 59, G01N 3100, H01S 322

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051496593

ABSTRACT:
The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alkali metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.

REFERENCES:
patent: 2925327 (1960-02-01), Katz et al.
patent: 3579305 (1971-05-01), Neti
patent: 3847552 (1974-11-01), Hobgood et al.
patent: 3915645 (1975-10-01), Funke et al.
patent: 4147513 (1979-04-01), Bienkowski et al.
patent: 4298347 (1981-11-01), Walsh
patent: 4637987 (1987-01-01), Minten et al.
patent: 4740982 (1988-04-01), Hakuta et al.
patent: 5017499 (1991-05-01), Hakuta et al.
"The Merck Index" 10th ed., 596, New Jersey, Merck and Co., Inc., 1983.
"Inorganic and Theoretical Chemistry" vol. 3, J. W. Mellor, New York, Longmans, Green and Co., 1946.
Kaye, S. et al., "Electroanalytical Determination of Molecular Fluorine" Analytical Chemistry, vol. 40, No. 14, 2217-2218, 1968.
Macdonald, A. M. G. et al., "Fluorine" Encyclopedia of Industrial Chemical Analysis, vol. 13, 3-5, New York, London-Sydney-Toronto, 1971.

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