Abrading – Machine – Rotary tool
Patent
1998-02-02
2000-09-19
Eley, Timothy V.
Abrading
Machine
Rotary tool
451288, 451290, 451527, 451550, B24B 2900
Patent
active
061203610
ABSTRACT:
A polishing apparatus includes a polishing layer formed of forming resin and having a plurality of mechanical polishing particles contained in the polishing layer so as to be partially exposed from a polishing surface thereof. An object to be polished and the polishing layer are rotated relative to each other so that the object is polished with the mechanical polishing particles, in a state in which the object is allowed to contact with the polishing surface of the polishing layer.
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Iwashita Mitsuaki
Konishi Nobuo
Eley Timothy V.
Tokyo Electron Limited
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