Polishing apparatus, polishing member

Abrading – Machine – Rotary tool

Patent

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Details

451288, 451290, 451527, 451550, B24B 2900

Patent

active

061203610

ABSTRACT:
A polishing apparatus includes a polishing layer formed of forming resin and having a plurality of mechanical polishing particles contained in the polishing layer so as to be partially exposed from a polishing surface thereof. An object to be polished and the polishing layer are rotated relative to each other so that the object is polished with the mechanical polishing particles, in a state in which the object is allowed to contact with the polishing surface of the polishing layer.

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patent: 5895550 (1999-04-01), Andreas

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