Process for making avalanche fuse element with isolated emitter

Metal working – Method of mechanical manufacture – Assembling or joining

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29571, 29578, 29591, H01L 21326

Patent

active

045626391

ABSTRACT:
A programmable device is provided by a thin-oxide avalanche fuse element which is programmed at a voltage below the oxide breakdown level. This device may be used to fix the addresses of faulty rows or columns in a memory having redundant or substitute cells. Upon breakdown, the thin oxide is perforated by small holes which fill with silicon to create short circuit. The source or emitter of the transistor device may be separated from the drain and gate by thick filled oxide.

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