Method for manufacturing a vibrating beam accelerometer

Details Method for manufacturing a vibrating beam accelerometer Method for manufacturing a vibrating beam accelerometer

1999-03-30

2000-09-19

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

438 52, G01P 1510

Patent

active

061195200

ABSTRACT:
The method of the present invention includes forming a frame and a proof mass suspended from the frame by one or more flexures, and including within a thin active layer one or more vibratory force transducers suitably coupled to the proof mass for detecting a force applied to the proof mass. According to the present invention, an insulating layer, such as silicon oxide, is formed between the substrate and the active layer to insulate the active layer from the substrate. Providing a separate insulating layer between the substrate and active layer improves the electrical insulation between the proof mass and the transducers, which allows for effective operation over a wide range of temperatures.

REFERENCES:
patent: 4901586 (1990-02-01), Blake et al.

Affiliated with

Also associated with

Rating

Method for manufacturing a vibrating beam accelerometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for manufacturing a vibrating beam accelerometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for manufacturing a vibrating beam accelerometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1060860