Process for preparing a charge coupled device with charge transf

Details Process for preparing a charge coupled device with charge transf Process for preparing a charge coupled device with charge transf

1986-10-07

1988-05-24

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 29, 437 53, 437186, 437200, 357 24, H01L 2978

Patent

active

047466227

ABSTRACT:
A process is disclosed of preparing a charge coupled device containing charge transfer direction biasing implants wherein the steps and materials for patterning electrodes and implants promote accurate edge alignments of implants and electrodes while minimizing strains and avoiding temperatures that permit unwanted lattice or intersticial ion migration in the semiconductive substrate.

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