Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Patent
1994-05-12
1996-08-27
Fields, Carolyn E.
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
25033912, 2503414, G01N 2135
Patent
active
055503748
ABSTRACT:
Nondestructive methods and apparatus for determining a concentration of interstitial oxygen in a generally cylindrical body of crystalline silicon. The invention transmits an infrared (IR) beam through the body generally transverse to a longitudinal axis of the body and measures the absorption coefficient of an interstitial oxygen absorption band at a wavenumber W.sub.p of approximately 1720 cm.sup.-1. Further, the invention determines the concentration of interstitial oxygen in the body as a function of the measured absorption coefficient.
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Drescher Klaus
Holzer Joseph C.
Korb Harold W.
Fields Carolyn E.
Glick Edward J.
MEMC Electronic Materials , Inc.
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