Using spectral signature analysis in producing substrates for ma

Details Using spectral signature analysis in producing substrates for ma Using spectral signature analysis in producing substrates for ma

1991-01-31

1993-09-21

Smith, Jerry

Boots, shoes, and leggings

364576, G06F 1546

Patent

active

052474488

ABSTRACT:
A formation process has a plurality of process steps performed according to a set of process parameters. The formation process is used to form substrates in magnetic discs. A displacement signal is obtained which is representative of surface displacement of the substrate after at least one of the process steps. A first spectral signature is determined based on the displacement signal. The first spectral signature has characteristics representative of the surface displacement of the substrate when processed according to a first set of process parameters. The first spectral signature is compared with a second spectral signature having characteristics indicative of surface displacement of a substrate when processed according to a second set of process parameters. Based on the comparison, the set of process parameters is identified which provides a spectral signature closest to a desired spectral signature.

REFERENCES:
patent: 4479090 (1984-10-01), Frater et al.
patent: 4702101 (1987-10-01), Abbe et al.
patent: 4808455 (1989-02-01), Wada et al.
patent: 4850695 (1989-07-01), Mikuriya et al.
"An Automated System For Production Quality Assurance Using Mechanical Signature Analysis" by Joseph Cheng-Tsu Liu, 1982.

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