Wet processing apparatus having individual reactivating feedback

Details Wet processing apparatus having individual reactivating feedback Wet processing apparatus having individual reactivating feedback

1995-03-24

1996-08-27

Valentine, Donald R.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

204237, 204238, 204239, 204262, 204265, 204275, 204276, 204277, 204273, C25F 702, C25B 1502, C25B 1508

Patent

active

055497985

ABSTRACT:
In a wet processing apparatus, an electrolytic cell, a first storing cell for storing anode active water of the electrolytic cell, a first processing cell for processing a target with the anode active water of the first storing cell, a second storing cell for storing cathode active water of the electrolytic cell, and a second processing cell for processing a target with the cathode active water of the second storing cell are provided. Also, a first reactivating feedback path is provided between the first processing cell and an anode region of the electrolytic cell, and a second reactivating feedback path is provided between the second processing cell and a cathode region of the electrolytic cell.

REFERENCES:
patent: 4834850 (1989-05-01), de Nora et al.
patent: 4891103 (1990-01-01), Zorinsky et al.
patent: 5173161 (1992-12-01), Gramm
patent: 5411652 (1995-05-01), Smith et al.
patent: 5431801 (1995-07-01), Nishimura et al.
patent: 5458755 (1995-10-01), Fujiyama et al.

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