Method of manufacturing full CMOS type SRAM

Details Method of manufacturing full CMOS type SRAM Method of manufacturing full CMOS type SRAM

1992-03-23

1994-07-26

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 52, 257369, H01L 2170

Patent

active

053326881

ABSTRACT:
A method for manufacture of a full CMOS type SRAM, comprising the steps of forming a first mask layer on a semiconductor layer, and patterning the first mask layer by photolithography to form semiconductor island layers where a driver MOS transistor and a load MOS transistor are formable with a slight space therebetween; forming a second mask layer on the semiconductor layer, and patterning the second mask layer by photolithography in such a manner as to overlap the region with one of the driver and load MOS transistors, but not to overlap the isolating region between the transistors; masking, with a resist film, the region with the other of the driver and load MOS transistors, and etching the first mask layer while masking the same with the resist film and the second mask layer; and etching the semiconductor layer while masking the same with the first mask layer, thereby forming mutually isolated semiconductor island layers where the driver and load MOS transistors are formed respectively. According to this method, the width of each transistor and the space between the transistors can be minimized to consequently achieve an enhanced integration density.

REFERENCES:
patent: 4740479 (1988-04-01), Neppl et al.
patent: 4805148 (1989-02-01), Diehl-Nagle et al.
patent: 4890141 (1989-12-01), Tang
patent: 4904200 (1991-01-01), Saitoo et al.
patent: 5051812 (1991-09-01), Onuki et al.
patent: 5128731 (1992-07-01), Lien et al.

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