Local encroachment reduction

Details Local encroachment reduction Local encroachment reduction

1993-04-30

1994-07-26

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

437 47, 437 48, 437 52, 437 69, H01L 21265

Patent

active

053326822

ABSTRACT:
Local Encroachment Reduction (LER) is described, in which a fraction of field oxide is selectively etched. A high energy boron implant is used to maintain adequate active area isolation after the removal. This implant also doubles as a LER high capacitance and provides a carrier to minority substrate electrons. After the high energy boron implant, an N-type bottom plate capacitor is implanted. At that point, the wafer is completed by existing techniques.

REFERENCES:
patent: 4240092 (1980-12-01), Kuo
patent: 4352236 (1982-10-01), McCollum
patent: 4366613 (1983-01-01), Ogura et al.
patent: 4414058 (1983-11-01), Mueller
patent: 4507159 (1985-03-01), Erb
patent: 4612565 (1986-09-01), Shimizu et al.
patent: 4686552 (1987-08-01), Teng et al.
patent: 4702797 (1987-10-01), Shimano et al.
patent: 4883543 (1989-11-01), Gossen, Jr. et al.
patent: 4945066 (1990-07-01), Kang et al.
patent: 4959325 (1990-09-01), Lee et al.
patent: 4997774 (1991-03-01), Kim

Affiliated with

Also associated with

Rating

Local encroachment reduction does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Local encroachment reduction, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Local encroachment reduction will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1052811