Integrated optical displacement sensor

Details Integrated optical displacement sensor Integrated optical displacement sensor

1992-04-29

1993-09-21

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250307, G01N 2186

Patent

active

052471861

ABSTRACT:
An integrated optical displacement sensor for measuring displacement of a sample, comprises a semiconductor substrate, laser for generating a laser beam, two micro-lens for focusing the laser beam generated from the laser on a surface of the sample, and an optical detector for detecting a reflection light reflected on the surface of the sample and for obtaining an output signal which varies in accordance with displacement of the sample. The laser, lens and detector are integrated with the substrate.

REFERENCES:
patent: 3842263 (1974-10-01), Kornrumpf et al.
patent: 4724318 (1988-02-01), Binnig
patent: 5025658 (1991-06-01), Elings et al.
patent: 5105239 (1992-04-01), Uchino et al.
patent: 5130531 (1992-07-01), Ito et al.

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