Ion beam processing apparatus and specimen replacing method for

Details Ion beam processing apparatus and specimen replacing method for Ion beam processing apparatus and specimen replacing method for

1991-11-22

1993-09-21

Hannaher, Constantine

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

25044011, 25044211, G21K 510

Patent

active

052471810

ABSTRACT:
An ion beam processing apparatus which processes specimens held by a specimen holder in a vacuum vessel by irradiating the specimen with an ion beam. The apparatus includes a raising/lowering device for raising and lowering the specimen holder. When replacing the processed specimen by an unprocessed specimen, the specimen holder is raised and lowered by the raising/lowering device to effect specimen replacement. Due to this arrangement, specimen replacement can be performed automatically without opening the vacuum vessel to atmospheric air thereby increasing productivity.

REFERENCES:
patent: 3968885 (1976-07-01), Hassan et al.
patent: 4272682 (1981-06-01), Swann
patent: 4705951 (1987-11-01), Layman et al.

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