Trenching techniques for forming channels, vias and components i

Details Trenching techniques for forming channels, vias and components i Trenching techniques for forming channels, vias and components i

1992-02-24

1993-06-15

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437192, 437194, 437228, 437229, 437238, 437944, H01L 21283, H01L 21306

Patent

active

052197875

ABSTRACT:
Trenching techniques for forming a channel partially through and a via completely through the insulating layer of a substrate are disclosed. With additional steps the channel can form an electrically conductive line, an electrode of an integrated capacitor, or an optical waveguide.

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