Method for forming Schottky diode

Fishing – trapping – and vermin destroying

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437 39, 156DIG68, H01L 21265

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active

052197697

ABSTRACT:
A method for forming a diode provided with electrodes and a semiconductive layer. Such method comprises applying ion beam irradiation to a substrate having a protruding portion at a desired position for monocrystalline diamond formation. In this manner the substrate is and subjected to surface modification thereby effecting a process for diamond crystal growth on the substrate.

REFERENCES:
patent: 4836881 (1989-06-01), Satoh et al.
patent: 4863529 (1989-09-01), Imai et al.
patent: 4927619 (1990-05-01), Tsuji
patent: 4982443 (1991-01-01), Nakahata et al.
patent: 5010033 (1991-04-01), Tokunaga et al.
Materials Research Society Publication, 1989 Fall Meeting, Nov. 27-Dec. 2, 1989, H. Karawada et al., "Selective Nucleation Based Epitaxy of CVD Diamond and Its Applicability to Semiconducting Device".
Matsumoto et al. "Vapor Deposition of Diamond Particles from Methane," Jap. Journal of Applied Physics, pp. L183-L185.

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