Micro-article processing system

Details Micro-article processing system Micro-article processing system

1976-10-04

1979-05-22

Corbin, John K.

Optics: measuring and testing

By alignment in lateral direction

With light detector

250561, 356387, G01B 1100, G01B 1126

Patent

active

041556500

ABSTRACT:
A system comprising a detector for detecting a shift of a optical pattern formed on a semiconductor pellet at a distance from the datum point set on both sides of the pattern and giving a signal indicative of said shift, and a bonding device for wire-bonding said pellet with the shift compensated which has been shifted correspondingly to the shift of the pellet.

REFERENCES:
patent: 3643098 (1972-02-01), Willits
patent: 3806253 (1974-04-01), Denton
patent: 3937928 (1976-02-01), Sasaki et al.
patent: 3941985 (1976-03-01), Kawase et al.
Eisenstadt et al., "Automatic Semiconductor Positioning System", IBM Tech. Disc. Bull., vol. 14, 4-72, pp. 3370-3371.
Khoury H.A., "2-D Area Array Solid-State Feedback Automatic Wafer Alignment System", IBM Tech. Disc. Bull., 3-75, pp. 2890-2892.
Moore, R. L., "High-Speed Servo Positioner Bonds Mesa Transistors", Electronics, 2-8-63, pp. 58-61.

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