Electrode structure for a zinc oxide thin film

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310363, 310364, H01L 4108

Patent

active

044332645

ABSTRACT:
An electrode structure for a zinc oxide thin film having a SnO.sub.2 layer between the surface of the zinc oxide thin film and the electrode. A tuning fork vibrator equipped with such a structure has a high reliability in that changes in resonance frequency and insulation resistance (IR) with time are small and the increase in series resonance resistance (R.sub.O) is small.

REFERENCES:
patent: 3846649 (1974-11-01), Lemann et al.
patent: 3984790 (1976-10-01), Tanaka
patent: 4037121 (1977-07-01), Nakamura et al.
patent: 4178526 (1979-12-01), Nakamura et al.
patent: 4302694 (1981-11-01), Fujishima et al.

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