Electron beam exposure system having the capability of checking

Details Electron beam exposure system having the capability of checking Electron beam exposure system having the capability of checking

1991-09-18

1993-01-19

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250297, 250398, H01J 3730

Patent

active

051809192

ABSTRACT:
An electron beam exposure system having a capability of checking a pattern to be written on an object comprises an electron beam source for producing an electron beam along an optical axis toward the object, a block mask provided on the optical axis and having selectable aperture patterns therein for correspondingly shaping the electron beam, an addressing deflector fixture for selectively passing the electron beam through a desired aperture on the block mask, an electron optical system for focusing the electron beam shaped by the block mask on the object such that an image of the aperture of the block mask is projected on the object, a screen provided along the optical axis between the block mask and the object for interrupting the electron beam when the electron beam is offset from the alignment with the optical axis, the screen having a through-hole in alignment with the optical axis for passing the electron beam therethrough a controller for controlling the electron optical system such that an image of the aperture of the beam shaping means through which the electron beam has passed is projected on the screen when checking the pattern of the apertures on the block mask, and a detection unit for detecting the image of the aperture that is projected on the screen.

REFERENCES:
patent: 4578587 (1986-03-01), Behringer et al.
patent: 5061851 (1991-10-01), Noguchi

Affiliated with

Also associated with

Rating

Electron beam exposure system having the capability of checking does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron beam exposure system having the capability of checking , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam exposure system having the capability of checking will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-103556