Coating apparatus

Details Coating apparatus Coating apparatus

1990-01-31

1991-12-10

Hoag, Willard

Coating apparatus

Interfacing control of plural operations

118708, 118710, 118730, 118 50, 118319, 137111, 417300, B05C 500

Patent

active

050708139

ABSTRACT:
Disclosed is a coating apparatus, comprising a gas exhaust rate controller disposed within an exhaust pipe connected to a cup which houses a substance to be treated, and a branch pipe connected to the exhaust pipe. The flow speed of the fluid within the branch pipe is measured, and the driving of the exhaust rate controller is controlled based on the measured value of the flow speed in accordance with the state of treatment of the object to be treated.

REFERENCES:
patent: 3730134 (1973-05-01), Kadi
patent: 4016828 (1977-04-01), Maher et al.
patent: 4760822 (1973-08-01), Evans
patent: 4821674 (1989-04-01), DeBoer et al.
patent: 4980204 (1990-12-01), Fujii et al.

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