Process for in-situ formation of niobium-insulator-niobium Josep

Details Process for in-situ formation of niobium-insulator-niobium Josep Process for in-situ formation of niobium-insulator-niobium Josep

1982-05-10

1984-02-21

Hearn, Brian E.

Metal working

Method of mechanical manufacture

Assembling or joining

29591, 29599, 357 5, 427 62, H01L 3924, H01L 3922

Patent

active

044321341

ABSTRACT:
A method of forming a superconductor-barrier-superconductor junction device by the steps of depositing a first superconductive layer on a substrate, forming a barrier layer on the first superconductive layer and depositing a second superconductive layer on the barrier layer. A layer of photoresist is then deposited over the second superconductive layer and patterned together with the second superconductive layer to form a mesa structure. A dielectric layer is deposited over the mesa structure, and the photoresist layer portion is dissolved thereby lifting off the dielectric portion overlying said second superconductive layer portion.

REFERENCES:
patent: 4316785 (1982-02-01), Suzuki et al.
Matsuda, A. et al., "Study of Nb-Based Josephson Tunnel Junctions," in J. Appl. Phys. 51(8), Aug. -1980.

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