Electron beam tester and testing method using the same

Details Electron beam tester and testing method using the same Electron beam tester and testing method using the same

1995-02-09

1997-10-28

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324765, G01R 31305

Patent

active

056821042

ABSTRACT:
In the present invention, a signal is input to a device by the device input apparatus, a trigger signal is input to the electron beam tester, and a wiring pattern of the layout obtained from design data is displayed on the display. A beam is applied onto a predetermined measurement point in the wiring while operating the device by the irradiation means, and the amount of secondary electrons emitted from the irradiated measurement point is detected by the detector. The potential at the measurement point, which corresponds to the amount of the secondary electrons detected, calculated from the calculation means (not shown), and the potential data obtained from this calculation is displayed being superimposed on the wiring pattern of the layout.

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IEICE Transactions on Electronics, vol. E77-C, No. 4, Apr. 1994, pp. 546-551, Nakamae et al., "Efficient Dynamic Fault Imaging by Fully Utilizing CAD . . . System".
Meeting the Tests of Time, Aug. 29, 1989, Institute of Electrical Engineers, pp. 923-927, Talbot et al., "A Logic Analyzer Tool that Cuts E-Beam . . . Times".
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