Relief diffraction grating encoder

Details Relief diffraction grating encoder Relief diffraction grating encoder

1990-03-20

1991-06-04

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250237G, G01D 534

Patent

active

050216490

ABSTRACT:
An encoder of this invention radiates a light beam onto an optical scale, in which a reflection film is formed on a surface of a relief type diffraction grating formed on one surface of a light-transmission substrate, from a surface opposite to the formation surface of the diffraction grating, and detects a change in intensity of interference light caused by diffracted light produced by the diffraction grating, thereby measuring a displacement of the optical scale.

REFERENCES:
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patent: 4459026 (1984-07-01), Pekelsky
patent: 4656347 (1987-04-01), Une et al.
patent: 4664524 (1987-05-01), Hattori et al.
patent: 4705996 (1987-11-01), Harshberger, Jr. et al.
patent: 4746792 (1988-05-01), Dil
patent: 4785181 (1988-11-01), Kimizuka et al.
patent: 4885734 (1989-12-01), Yuzo
patent: 4929822 (1990-05-01), Nakamura et al.

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