Polyetherketone resin compositions and carries for processing an

Details Polyetherketone resin compositions and carries for processing an Polyetherketone resin compositions and carries for processing an

1996-01-19

1997-10-28

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

At least one aryl ring which is part of a fused or bridged...

524848, 524425, 524430, 524449, 524451, 524445, C08K 304

Patent

active

056818882

ABSTRACT:
A polyetherketone resin composition comprising 5-100 parts by weight of a carbon fiber having an average fiber diameter of 5-20 .mu.m and an average fiber length of 30-500 .mu.m per 100 parts by weight of a composition comprising 95-50% by weight of a polyetherketone and 5-50% by weight of a liquid crystal polyester, and a carrier for processing or treating a semi-conductor wafer molded from the above polyetherketone resin composition. Said composition is excellent in molding properties and said carrier is excellent in stiffness, dimensional stability and antistatic properties.
The above liquid crystal polyester includes, for example, those consisting of repeating structural units (I), (II), (III) and (IV), shown below, in a 0.9-1.1 and a molar ratio (IV)/(III) of 0-1.0. ##STR1##

REFERENCES:
patent: 4804697 (1989-02-01), Saito et al.
patent: 5131827 (1992-07-01), Tasaka

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