High precision polishing tool

Details High precision polishing tool High precision polishing tool

1996-02-06

1997-10-28

Rose, Robert A.

Abrading

Accessory

Abradant supplying

451 36, 451461, 451550, 451551, B24B 5700

Patent

active

056812167

ABSTRACT:
A polishing tool having a polishing wheel that forms a set of pockets wherein the pockets receive a stream of water and are formed such that a high hydrostatic pressure builds in the pockets as the polishing tool rotates in a high precision grinding machine and addresses a surface of a substrate. The high hydrostatic pressure removes material from the surface of the substrate while preserving the precise thickness variation control of the high precision grinding machine.

REFERENCES:
patent: 1890401 (1932-12-01), Mitchell
patent: 1956781 (1934-05-01), Waldron
patent: 2039578 (1936-05-01), Blount
patent: 3715842 (1973-02-01), Trednnick et al.
patent: 4490948 (1985-01-01), Hanstein et al.
patent: 4821461 (1989-04-01), Holmstrand
patent: 5076024 (1991-12-01), Akagawa et al.
patent: 5533923 (1996-07-01), Shamouilian et al.

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