Method of manufacturing a wiring system

Details Method of manufacturing a wiring system Method of manufacturing a wiring system

1983-06-07

1985-12-31

Hearn, Brian E.

Metal working

Method of mechanical manufacture

Assembling or joining

29591, 156644, 156652, 156656, H01L 2190

Patent

active

045611734

ABSTRACT:
A self-registering method of manufacturing an air-(vacuum) -insulated crossing multilayer wiring system of large density is disclosed. Between the lowermost and uppermost wiring layers an intermediate layer is provided in which recesses are formed between the intermediate layer and the lowermost wiring layer. By means of said recesses the intermediate layer can be removed entirely at the area of the crossings during the etching process, while elsewhere portions of the intermediate layer remain as supporting parts or as connecting members.

REFERENCES:
patent: 3461524 (1969-08-01), Lepselter
patent: 3647585 (1972-03-01), Fritzinger et al.
patent: 3769108 (1973-10-01), Feldman et al.
patent: 3783056 (1974-01-01), Keller et al.
patent: 3801388 (1974-04-01), Akiyama et al.
patent: 3890177 (1975-06-01), Pfahnl et al.
patent: 3993515 (1976-11-01), Reichert
patent: 4308090 (1981-12-01), Te Velde et al.
patent: 4309242 (1982-01-01), Te Velde et al.

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